Review on the Modeling of Electrostatic MEMS

Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduc...

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Detalles Bibliográficos
Autores principales: Chuang, Wan-Chun, Lee, Hsin-Li, Chang, Pei-Zen, Hu, Yuh-Chung
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2010
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3247752/
https://www.ncbi.nlm.nih.gov/pubmed/22219707
http://dx.doi.org/10.3390/s100606149
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author Chuang, Wan-Chun
Lee, Hsin-Li
Chang, Pei-Zen
Hu, Yuh-Chung
author_facet Chuang, Wan-Chun
Lee, Hsin-Li
Chang, Pei-Zen
Hu, Yuh-Chung
author_sort Chuang, Wan-Chun
collection PubMed
description Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices.
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spelling pubmed-32477522012-01-04 Review on the Modeling of Electrostatic MEMS Chuang, Wan-Chun Lee, Hsin-Li Chang, Pei-Zen Hu, Yuh-Chung Sensors (Basel) Review Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices. Molecular Diversity Preservation International (MDPI) 2010-06-21 /pmc/articles/PMC3247752/ /pubmed/22219707 http://dx.doi.org/10.3390/s100606149 Text en © 2010 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).
spellingShingle Review
Chuang, Wan-Chun
Lee, Hsin-Li
Chang, Pei-Zen
Hu, Yuh-Chung
Review on the Modeling of Electrostatic MEMS
title Review on the Modeling of Electrostatic MEMS
title_full Review on the Modeling of Electrostatic MEMS
title_fullStr Review on the Modeling of Electrostatic MEMS
title_full_unstemmed Review on the Modeling of Electrostatic MEMS
title_short Review on the Modeling of Electrostatic MEMS
title_sort review on the modeling of electrostatic mems
topic Review
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3247752/
https://www.ncbi.nlm.nih.gov/pubmed/22219707
http://dx.doi.org/10.3390/s100606149
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