Rolled-up tubes and cantilevers by releasing SrRuO(3)-Pr(0.7)Ca(0.3)MnO(3 )nanomembranes

Three-dimensional micro-objects are fabricated by the controlled release of inherently strained SrRuO(3)/Pr(0.7)Ca(0.3)MnO(3)/SrRuO(3 )nanometer-sized trilayers from SrTiO(3)(001) substrates. Freestanding cantilevers and rolled-up microtubes with a diameter of 6 to 8 μm are demonstrated. The etching...

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Detalles Bibliográficos
Autores principales: Deneke, Christoph, Wild, Elisabeth, Boldyreva, Ksenia, Baunack, Stefan, Cendula, Peter, Mönch, Ingolf, Simon, Markus, Malachias, Angelo, Dörr, Kathrin, Schmidt, Oliver G
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2011
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3257320/
https://www.ncbi.nlm.nih.gov/pubmed/22151894
http://dx.doi.org/10.1186/1556-276X-6-621
Descripción
Sumario:Three-dimensional micro-objects are fabricated by the controlled release of inherently strained SrRuO(3)/Pr(0.7)Ca(0.3)MnO(3)/SrRuO(3 )nanometer-sized trilayers from SrTiO(3)(001) substrates. Freestanding cantilevers and rolled-up microtubes with a diameter of 6 to 8 μm are demonstrated. The etching behavior of the SrRuO(3 )film is investigated, and a selectivity of 1:9,100 with respect to the SrTiO(3 )substrate is found. The initial and final strain states of the rolled-up oxide layers are studied by X-ray diffraction on an ensemble of tubes. Relaxation of the sandwiched Pr(0.7)Ca(0.3)MnO(3 )layer towards its bulk lattice parameter is observed as the major driving force for the roll-up of the trilayers. Finally, μ-diffraction experiments reveal that a single object can represent the ensemble proving a good homogeneity of the rolled-up tubes. PACS: 81.07.-b; 68.60.-p; 68.37.Lp; 81.16.Dn.

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