Cargando…

Fabrication of Wireless Micro Pressure Sensor Using the CMOS Process

In this study, we fabricated a wireless micro FET (field effect transistor) pressure sensor based on the commercial CMOS (complementary metal oxide semiconductor) process and a post-process. The wireless micro pressure sensor is composed of a FET pressure sensor, an oscillator, an amplifier and an a...

Descripción completa

Detalles Bibliográficos
Autores principales:	Dai, Ching-Liang, Lu, Po-Wei, Wu, Chyan-Chyi, Chang, Chienliu
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Molecular Diversity Preservation International (MDPI) 2009
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3260611/ https://www.ncbi.nlm.nih.gov/pubmed/22291534 http://dx.doi.org/10.3390/s91108748

Ejemplares similares

Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique
por: Fong, Chien-Fu, et al.
Publicado: (2015)

Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip
por: Dai, Ching-Liang, et al.
Publicado: (2009)

Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the CMOS Process without Any Post-Process
por: Tseng, Jian-Zhi, et al.
Publicado: (2014)

Thermoelectric Energy Micro Harvesters with Temperature Sensors Manufactured Utilizing the CMOS-MEMS Technique
por: Shen, Yi-Xuan, et al.
Publicado: (2022)

Micro Ethanol Sensors with a Heater Fabricated Using the Commercial 0.18 μm CMOS Process
por: Liao, Wei-Zhen, et al.
Publicado: (2013)

Manufacture of a Polyaniline Nanofiber Ammonia Sensor Integrated with a Readout Circuit Using the CMOS-MEMS Technique
por: Liu, Mao-Chen, et al.
Publicado: (2009)

Fabrication and Characterization of CMOS-MEMS Thermoelectric Micro Generators
por: Kao, Pin-Hsu, et al.
Publicado: (2010)

Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique
por: Kao, Pin-Hsu, et al.
Publicado: (2009)

Modeling and Fabrication of Micro FET Pressure Sensor with Circuits
por: Dai, Ching-Liang, et al.
Publicado: (2007)

A CMOS Pressure Sensor Tag Chip for Passive Wireless Applications
por: Deng, Fangming, et al.
Publicado: (2015)

Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on Chip
por: Dai, Ching-Liang, et al.
Publicado: (2010)

Micro Magnetic Field Sensors Manufactured Using a Standard 0.18-μm CMOS Process
por: Lin, Yen-Nan, et al.
Publicado: (2018)

An Acetone Microsensor with a Ring Oscillator Circuit Fabricated Using the Commercial 0.18 μm CMOS Process
por: Yang, Ming-Zhi, et al.
Publicado: (2014)

Fabrication and Characterization of CMOS-MEMS Magnetic Microsensors
por: Hsieh, Chen-Hsuan, et al.
Publicado: (2013)

Sol-Gel Zinc Oxide Humidity Sensors Integrated with a Ring Oscillator Circuit On-a-Chip
por: Yang, Ming-Zhi, et al.
Publicado: (2014)

Piezoresistive temperature sensors fabricated by a surface micromachining CMOS MEMS process
por: Cai, Chunhua, et al.
Publicado: (2018)

Low-Concentration Ammonia Gas Sensors Manufactured Using the CMOS–MEMS Technique
por: Shen, Wei-Chun, et al.
Publicado: (2020)

Magnetic Micro Sensors with Two Magnetic Field Effect Transistors Fabricated Using the Commercial Complementary Metal Oxide Semiconductor Process
por: Chen, Wei-Ren, et al.
Publicado: (2020)

Design and Fabrication of Vertically-Integrated CMOS Image Sensors
por: Skorka, Orit, et al.
Publicado: (2011)

Fabrication and Characterization of a CMOS-MEMS Humidity Sensor
por: Dennis, John-Ojur, et al.
Publicado: (2015)

The Enzymatic Doped/Undoped Poly-Silicon Nanowire Sensor for Glucose Concentration Measurement
por: Hsu, Cheng-Chih, et al.
Publicado: (2023)

Fabrications and Performance of Wireless LC Pressure Sensors through LTCC Technology
por: Lin, Lin, et al.
Publicado: (2018)

Manufacturing and Characterization of Three-Axis Magnetic Sensors Using the Standard 180 nm CMOS Technology
por: Wu, Chi-Han, et al.
Publicado: (2021)

Energy Harvesting Thermoelectric Generators Manufactured Using the Complementary Metal Oxide Semiconductor Process
por: Yang, Ming-Zhi, et al.
Publicado: (2013)

Components of Artificial Neural Networks Realized in CMOS Technology to be Used in Intelligent Sensors in Wireless Sensor Networks
por: Talaśka, Tomasz
Publicado: (2018)

On-CMOS Image Sensor Processing for Lane Detection
por: Lee, Soyeon, et al.
Publicado: (2021)

Fabrication of a Flexible, Wireless Micro-Heater on Elastomer for Wearable Gas Sensor Applications
por: Cho, Jonam, et al.
Publicado: (2022)

Radiation hardness studies of neutron irradiated CMOS sensors fabricated in the ams H18 high voltage process
por: García, M Fern, et al.
Publicado: (2016)

Fabrication and Performance of Graphene Flexible Pressure Sensor with Micro/Nano Structure
por: Wu, Weibin, et al.
Publicado: (2021)

A Low-Power All-Digital on-Chip CMOS Oscillator for a Wireless Sensor Node
por: Sheng, Duo, et al.
Publicado: (2016)

A Zinc Oxide Nanorod Ammonia Microsensor Integrated with a Readout Circuit on-a-Chip
por: Yang, Ming-Zhi, et al.
Publicado: (2011)

Impact of Various Thermistors on the Properties of Resistive Microbolometers Fabricated by CMOS Process
por: Guo, Yaozu, et al.
Publicado: (2022)

Micro-Fabricated Sensors
por: Da Via, Cinzia
Publicado: (2014)

Micro-Fabricated Sensors
por: DA VIÀ, Cinzia
Publicado: (2014)

CMOS MEMS Fabrication Technologies and Devices
por: Qu, Hongwei
Publicado: (2016)

Optimization of a 65 nm CMOS imaging process for monolithic CMOS sensors for high energy physics
por: Rinella, G Aglieri, et al.
Publicado: (2023)

CMOS IC design for wireless medical and health care
por: Wang, Zhihua, et al.
Publicado: (2014)

Fabrication and Structural Design of Micro Pressure Sensors for Tire Pressure Measurement Systems (TPMS)
por: Tian, Bian, et al.
Publicado: (2009)

A Standard CMOS Humidity Sensor without Post-Processing
por: Nizhnik, Oleg, et al.
Publicado: (2011)

Self-Calibrated Humidity Sensor in CMOS without Post-Processing
por: Nizhnik, Oleg, et al.
Publicado: (2011)

Cannot write session to /tmp/vufind_sessions/sess_4f5ahk4qp9e85sriti6m0t66sp