Refractive Index Sensor Based on a 1D Photonic Crystal in a Microfluidic Channel

A refractive index sensor has been fabricated in silicon oxynitride by standard UV lithography and dry etching processes. The refractive index sensor consists of a 1D photonic crystal (PhC) embedded in a microfluidic channel addressed by fiber-terminated planar waveguides. Experimental demonstration...

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Detalles Bibliográficos
Autores principales: Nunes, Pedro S., Mortensen, Niels Asger, Kutter, Jörg P., Mogensen, Klaus B.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2010
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3264483/
https://www.ncbi.nlm.nih.gov/pubmed/22294930
http://dx.doi.org/10.3390/s100302348
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author Nunes, Pedro S.
Mortensen, Niels Asger
Kutter, Jörg P.
Mogensen, Klaus B.
author_facet Nunes, Pedro S.
Mortensen, Niels Asger
Kutter, Jörg P.
Mogensen, Klaus B.
author_sort Nunes, Pedro S.
collection PubMed
description A refractive index sensor has been fabricated in silicon oxynitride by standard UV lithography and dry etching processes. The refractive index sensor consists of a 1D photonic crystal (PhC) embedded in a microfluidic channel addressed by fiber-terminated planar waveguides. Experimental demonstrations performed with several ethanol solutions ranging from a purity of 96.00% (n = 1.36356) to 95.04% (n = 1.36377) yielded a sensitivity (Δλ/Δn) of 836 nm/RIU and a limit of detection (LOD) of 6 × 10(−5) RIU, which is, however, still one order of magnitude higher than the theoretical lower limit of the limit of detection 1.3 × 10(−)(6) RIU.
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spelling pubmed-32644832012-01-31 Refractive Index Sensor Based on a 1D Photonic Crystal in a Microfluidic Channel Nunes, Pedro S. Mortensen, Niels Asger Kutter, Jörg P. Mogensen, Klaus B. Sensors (Basel) Article A refractive index sensor has been fabricated in silicon oxynitride by standard UV lithography and dry etching processes. The refractive index sensor consists of a 1D photonic crystal (PhC) embedded in a microfluidic channel addressed by fiber-terminated planar waveguides. Experimental demonstrations performed with several ethanol solutions ranging from a purity of 96.00% (n = 1.36356) to 95.04% (n = 1.36377) yielded a sensitivity (Δλ/Δn) of 836 nm/RIU and a limit of detection (LOD) of 6 × 10(−5) RIU, which is, however, still one order of magnitude higher than the theoretical lower limit of the limit of detection 1.3 × 10(−)(6) RIU. Molecular Diversity Preservation International (MDPI) 2010-03-22 /pmc/articles/PMC3264483/ /pubmed/22294930 http://dx.doi.org/10.3390/s100302348 Text en © 2010 by the authors; licensee Molecular Diversity Preservation International, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).
spellingShingle Article
Nunes, Pedro S.
Mortensen, Niels Asger
Kutter, Jörg P.
Mogensen, Klaus B.
Refractive Index Sensor Based on a 1D Photonic Crystal in a Microfluidic Channel
title Refractive Index Sensor Based on a 1D Photonic Crystal in a Microfluidic Channel
title_full Refractive Index Sensor Based on a 1D Photonic Crystal in a Microfluidic Channel
title_fullStr Refractive Index Sensor Based on a 1D Photonic Crystal in a Microfluidic Channel
title_full_unstemmed Refractive Index Sensor Based on a 1D Photonic Crystal in a Microfluidic Channel
title_short Refractive Index Sensor Based on a 1D Photonic Crystal in a Microfluidic Channel
title_sort refractive index sensor based on a 1d photonic crystal in a microfluidic channel
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3264483/
https://www.ncbi.nlm.nih.gov/pubmed/22294930
http://dx.doi.org/10.3390/s100302348
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