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A Macroporous TiO(2) Oxygen Sensor Fabricated Using Anodic Aluminium Oxide as an Etching Mask

An innovative fabrication method to produce a macroporous Si surface by employing an anodic aluminium oxide (AAO) nanopore array layer as an etching template is presented. Combining AAO with a reactive ion etching (RIE) processes, a homogeneous and macroporous silicon surface can be effectively conf...

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Detalles Bibliográficos
Autores principales:	Lu, Chih-Cheng, Huang, Yong-Sheng, Huang, Jun-Wei, Chang, Chien-Kuo, Wu, Sheng-Po
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Molecular Diversity Preservation International (MDPI) 2010
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3270862/ https://www.ncbi.nlm.nih.gov/pubmed/22315561 http://dx.doi.org/10.3390/s100100670

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