Effect of Axial Force on the Performance of Micromachined Vibratory Rate Gyroscopes

It is reported in the published literature that the resonant frequency of a silicon micromachined gyroscope decreases linearly with increasing temperature. However, when the axial force is considerable, the resonant frequency might increase as the temperature increases. The axial force is mainly ind...

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Detalles Bibliográficos
Autores principales: Hou, Zhanqiang, Xiao, Dingbang, Wu, Xuezhong, Dong, Peitao, Chen, Zhihua, Niu, Zhengyi, Zhang, Xu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2010
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3274069/
https://www.ncbi.nlm.nih.gov/pubmed/22346578
http://dx.doi.org/10.3390/s110100296

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3274069/
https://www.ncbi.nlm.nih.gov/pubmed/22346578
http://dx.doi.org/10.3390/s110100296

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