A Miniature Fiber Optic Refractive Index Sensor Built in a MEMS-Based Microchannel

A small, highly sensitive, and electromagnetic interference (EMI)-immune refractive index (RI) sensor based on the Fabry-Perot (FP) interferometer is presented. The sensor’s FP cavity was fabricated by aligning two metal-deposited, single-mode optical fiber endfaces inside a microchannel on a silico...

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Detalles Bibliográficos
Autores principales: Tian, Ye, Wang, Wenhui, Wu, Nan, Zou, Xiaotian, Guthy, Charles, Wang, Xingwei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2011
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3274117/
https://www.ncbi.nlm.nih.gov/pubmed/22344393
http://dx.doi.org/10.3390/s110101078

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3274117/
https://www.ncbi.nlm.nih.gov/pubmed/22344393
http://dx.doi.org/10.3390/s110101078

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