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Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes

In this work micro temperature and humidity sensors are fabricated to measure the junction temperature and humidity of light emitting diodes (LED). The junction temperature is frequently measured using thermal resistance measurement technology. The weakness of this method is that the timing of data...

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Autores principales: Lee, Chi-Yuan, Su, Ay, Liu, Yin-Chieh, Chan, Pin-Cheng, Lin, Chia-Hung
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2010
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3274224/
https://www.ncbi.nlm.nih.gov/pubmed/22319303
http://dx.doi.org/10.3390/s100403363
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author Lee, Chi-Yuan
Su, Ay
Liu, Yin-Chieh
Chan, Pin-Cheng
Lin, Chia-Hung
author_facet Lee, Chi-Yuan
Su, Ay
Liu, Yin-Chieh
Chan, Pin-Cheng
Lin, Chia-Hung
author_sort Lee, Chi-Yuan
collection PubMed
description In this work micro temperature and humidity sensors are fabricated to measure the junction temperature and humidity of light emitting diodes (LED). The junction temperature is frequently measured using thermal resistance measurement technology. The weakness of this method is that the timing of data capture is not regulated by any standard. This investigation develops a device that can stably and continually measure temperature and humidity. The device is light-weight and can monitor junction temperature and humidity in real time. Using micro-electro-mechanical systems (MEMS), this study minimizes the size of the micro temperature and humidity sensors, which are constructed on a stainless steel foil substrate (40 μm-thick SS-304). The micro temperature and humidity sensors can be fixed between the LED chip and frame. The sensitivities of the micro temperature and humidity sensors are 0.06 ± 0.005 (Ω/°C) and 0.033 pF/%RH, respectively.
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spelling pubmed-32742242012-02-08 Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes Lee, Chi-Yuan Su, Ay Liu, Yin-Chieh Chan, Pin-Cheng Lin, Chia-Hung Sensors (Basel) Article In this work micro temperature and humidity sensors are fabricated to measure the junction temperature and humidity of light emitting diodes (LED). The junction temperature is frequently measured using thermal resistance measurement technology. The weakness of this method is that the timing of data capture is not regulated by any standard. This investigation develops a device that can stably and continually measure temperature and humidity. The device is light-weight and can monitor junction temperature and humidity in real time. Using micro-electro-mechanical systems (MEMS), this study minimizes the size of the micro temperature and humidity sensors, which are constructed on a stainless steel foil substrate (40 μm-thick SS-304). The micro temperature and humidity sensors can be fixed between the LED chip and frame. The sensitivities of the micro temperature and humidity sensors are 0.06 ± 0.005 (Ω/°C) and 0.033 pF/%RH, respectively. Molecular Diversity Preservation International (MDPI) 2010-04-07 /pmc/articles/PMC3274224/ /pubmed/22319303 http://dx.doi.org/10.3390/s100403363 Text en © 2010 by the authors; licensee Molecular Diversity Preservation International, Basel, Switzerland. This article is an open-access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).
spellingShingle Article
Lee, Chi-Yuan
Su, Ay
Liu, Yin-Chieh
Chan, Pin-Cheng
Lin, Chia-Hung
Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes
title Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes
title_full Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes
title_fullStr Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes
title_full_unstemmed Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes
title_short Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes
title_sort sensor fabrication method for in situ temperature and humidity monitoring of light emitting diodes
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3274224/
https://www.ncbi.nlm.nih.gov/pubmed/22319303
http://dx.doi.org/10.3390/s100403363
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