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Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes
In this work micro temperature and humidity sensors are fabricated to measure the junction temperature and humidity of light emitting diodes (LED). The junction temperature is frequently measured using thermal resistance measurement technology. The weakness of this method is that the timing of data...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Molecular Diversity Preservation International (MDPI)
2010
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3274224/ https://www.ncbi.nlm.nih.gov/pubmed/22319303 http://dx.doi.org/10.3390/s100403363 |
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author | Lee, Chi-Yuan Su, Ay Liu, Yin-Chieh Chan, Pin-Cheng Lin, Chia-Hung |
author_facet | Lee, Chi-Yuan Su, Ay Liu, Yin-Chieh Chan, Pin-Cheng Lin, Chia-Hung |
author_sort | Lee, Chi-Yuan |
collection | PubMed |
description | In this work micro temperature and humidity sensors are fabricated to measure the junction temperature and humidity of light emitting diodes (LED). The junction temperature is frequently measured using thermal resistance measurement technology. The weakness of this method is that the timing of data capture is not regulated by any standard. This investigation develops a device that can stably and continually measure temperature and humidity. The device is light-weight and can monitor junction temperature and humidity in real time. Using micro-electro-mechanical systems (MEMS), this study minimizes the size of the micro temperature and humidity sensors, which are constructed on a stainless steel foil substrate (40 μm-thick SS-304). The micro temperature and humidity sensors can be fixed between the LED chip and frame. The sensitivities of the micro temperature and humidity sensors are 0.06 ± 0.005 (Ω/°C) and 0.033 pF/%RH, respectively. |
format | Online Article Text |
id | pubmed-3274224 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2010 |
publisher | Molecular Diversity Preservation International (MDPI) |
record_format | MEDLINE/PubMed |
spelling | pubmed-32742242012-02-08 Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes Lee, Chi-Yuan Su, Ay Liu, Yin-Chieh Chan, Pin-Cheng Lin, Chia-Hung Sensors (Basel) Article In this work micro temperature and humidity sensors are fabricated to measure the junction temperature and humidity of light emitting diodes (LED). The junction temperature is frequently measured using thermal resistance measurement technology. The weakness of this method is that the timing of data capture is not regulated by any standard. This investigation develops a device that can stably and continually measure temperature and humidity. The device is light-weight and can monitor junction temperature and humidity in real time. Using micro-electro-mechanical systems (MEMS), this study minimizes the size of the micro temperature and humidity sensors, which are constructed on a stainless steel foil substrate (40 μm-thick SS-304). The micro temperature and humidity sensors can be fixed between the LED chip and frame. The sensitivities of the micro temperature and humidity sensors are 0.06 ± 0.005 (Ω/°C) and 0.033 pF/%RH, respectively. Molecular Diversity Preservation International (MDPI) 2010-04-07 /pmc/articles/PMC3274224/ /pubmed/22319303 http://dx.doi.org/10.3390/s100403363 Text en © 2010 by the authors; licensee Molecular Diversity Preservation International, Basel, Switzerland. This article is an open-access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/). |
spellingShingle | Article Lee, Chi-Yuan Su, Ay Liu, Yin-Chieh Chan, Pin-Cheng Lin, Chia-Hung Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes |
title | Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes |
title_full | Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes |
title_fullStr | Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes |
title_full_unstemmed | Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes |
title_short | Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes |
title_sort | sensor fabrication method for in situ temperature and humidity monitoring of light emitting diodes |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3274224/ https://www.ncbi.nlm.nih.gov/pubmed/22319303 http://dx.doi.org/10.3390/s100403363 |
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