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Development of a Hybrid Atomic Force Microscopic Measurement System Combined with White Light Scanning Interferometry
A hybrid atomic force microscopic (AFM) measurement system combined with white light scanning interferometry for micro/nanometer dimensional measurement is developed. The system is based on a high precision large-range positioning platform with nanometer accuracy on which a white light scanning inte...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Molecular Diversity Preservation International (MDPI)
2011
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3279207/ https://www.ncbi.nlm.nih.gov/pubmed/22368463 http://dx.doi.org/10.3390/s120100175 |