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Self-Calibrated Humidity Sensor in CMOS without Post-Processing
A 1.1 μW power dissipation, voltage-output humidity sensor with 10% relative humidity accuracy was developed in the LFoundry 0.15 μm CMOS technology without post-processing. The sensor consists of a woven lateral array of electrodes implemented in CMOS top metal, a humidity-sensitive layer of Interv...
Autores principales: | Nizhnik, Oleg, Higuchi, Kohei, Maenaka, Kazusuke |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Molecular Diversity Preservation International (MDPI)
2011
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3279210/ https://www.ncbi.nlm.nih.gov/pubmed/22368466 http://dx.doi.org/10.3390/s120100226 |
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