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Manufacture of a Polyaniline Nanofiber Ammonia Sensor Integrated with a Readout Circuit Using the CMOS-MEMS Technique

This study presents the fabrication of a polyaniline nanofiber ammonia sensor integrated with a readout circuit on a chip using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and a post-process. The micro ammonia sensor consists of a sensing resistor and an ammonia sen...

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Detalles Bibliográficos
Autores principales:	Liu, Mao-Chen, Dai, Ching-Liang, Chan, Chih-Hua, Wu, Chyan-Chyi
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Molecular Diversity Preservation International (MDPI) 2009
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3280836/ https://www.ncbi.nlm.nih.gov/pubmed/22399944 http://dx.doi.org/10.3390/s90200869

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