Surface Acoustic Wave Ammonia Sensors Based on ST-cut Quartz under Periodic Al Structure

Surface acoustic wave (SAW) devices are key components for sensing applications. SAW propagation under a periodic grating was investigated in this work. The theoretical method used here is the space harmonic method. We also applied the results of SAW propagation studied in this work to design a two-...

Descripción completa

Detalles Bibliográficos
Autores principales: Hsu, Cheng-Liang, Shen, Chi-Yen, Tsai, Rume-Tze, Su, Ming-Yau
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2009
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3280843/
https://www.ncbi.nlm.nih.gov/pubmed/22399951
http://dx.doi.org/10.3390/s90200980
_version_ 1782223870314414080
author Hsu, Cheng-Liang
Shen, Chi-Yen
Tsai, Rume-Tze
Su, Ming-Yau
author_facet Hsu, Cheng-Liang
Shen, Chi-Yen
Tsai, Rume-Tze
Su, Ming-Yau
author_sort Hsu, Cheng-Liang
collection PubMed
description Surface acoustic wave (SAW) devices are key components for sensing applications. SAW propagation under a periodic grating was investigated in this work. The theoretical method used here is the space harmonic method. We also applied the results of SAW propagation studied in this work to design a two-port resonator with an Al grating on ST-cut quartz. The measured frequency responses of the resonator were similar to the simulation ones. Then, the chemical interface of polyaniline/WO(3) composites was coated on the SAW sensor for ammonia detection. The SAW sensor responded to ammonia gas and could be regenerated using dry nitrogen.
format Online
Article
Text
id pubmed-3280843
institution National Center for Biotechnology Information
language English
publishDate 2009
publisher Molecular Diversity Preservation International (MDPI)
record_format MEDLINE/PubMed
spelling pubmed-32808432012-03-07 Surface Acoustic Wave Ammonia Sensors Based on ST-cut Quartz under Periodic Al Structure Hsu, Cheng-Liang Shen, Chi-Yen Tsai, Rume-Tze Su, Ming-Yau Sensors (Basel) Article Surface acoustic wave (SAW) devices are key components for sensing applications. SAW propagation under a periodic grating was investigated in this work. The theoretical method used here is the space harmonic method. We also applied the results of SAW propagation studied in this work to design a two-port resonator with an Al grating on ST-cut quartz. The measured frequency responses of the resonator were similar to the simulation ones. Then, the chemical interface of polyaniline/WO(3) composites was coated on the SAW sensor for ammonia detection. The SAW sensor responded to ammonia gas and could be regenerated using dry nitrogen. Molecular Diversity Preservation International (MDPI) 2009-02-16 /pmc/articles/PMC3280843/ /pubmed/22399951 http://dx.doi.org/10.3390/s90200980 Text en © 2009 by the authors; licensee Molecular Diversity Preservation International, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).
spellingShingle Article
Hsu, Cheng-Liang
Shen, Chi-Yen
Tsai, Rume-Tze
Su, Ming-Yau
Surface Acoustic Wave Ammonia Sensors Based on ST-cut Quartz under Periodic Al Structure
title Surface Acoustic Wave Ammonia Sensors Based on ST-cut Quartz under Periodic Al Structure
title_full Surface Acoustic Wave Ammonia Sensors Based on ST-cut Quartz under Periodic Al Structure
title_fullStr Surface Acoustic Wave Ammonia Sensors Based on ST-cut Quartz under Periodic Al Structure
title_full_unstemmed Surface Acoustic Wave Ammonia Sensors Based on ST-cut Quartz under Periodic Al Structure
title_short Surface Acoustic Wave Ammonia Sensors Based on ST-cut Quartz under Periodic Al Structure
title_sort surface acoustic wave ammonia sensors based on st-cut quartz under periodic al structure
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3280843/
https://www.ncbi.nlm.nih.gov/pubmed/22399951
http://dx.doi.org/10.3390/s90200980
work_keys_str_mv AT hsuchengliang surfaceacousticwaveammoniasensorsbasedonstcutquartzunderperiodicalstructure
AT shenchiyen surfaceacousticwaveammoniasensorsbasedonstcutquartzunderperiodicalstructure
AT tsairumetze surfaceacousticwaveammoniasensorsbasedonstcutquartzunderperiodicalstructure
AT sumingyau surfaceacousticwaveammoniasensorsbasedonstcutquartzunderperiodicalstructure

Ejemplares similares