Design and Analyses of a MEMS Based Resonant Magnetometer

A novel design of a MEMS torsional resonant magnetometer based on Lorentz force is presented and fabricated. The magnetometer consists of a silicon resonator, torsional beam, excitation coil, capacitance plates and glass substrate. Working in a resonant condition, the sensor’s vibration amplitude is...

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Detalles Bibliográficos
Autores principales: Ren, Dahai, Wu, Lingqi, Yan, Meizhi, Cui, Mingyang, You, Zheng, Hu, Muzhi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2009
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3290475/
https://www.ncbi.nlm.nih.gov/pubmed/22399981
http://dx.doi.org/10.3390/s90906951

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3290475/
https://www.ncbi.nlm.nih.gov/pubmed/22399981
http://dx.doi.org/10.3390/s90906951

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