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Design and Analyses of a MEMS Based Resonant Magnetometer
A novel design of a MEMS torsional resonant magnetometer based on Lorentz force is presented and fabricated. The magnetometer consists of a silicon resonator, torsional beam, excitation coil, capacitance plates and glass substrate. Working in a resonant condition, the sensor’s vibration amplitude is...
Autores principales: | Ren, Dahai, Wu, Lingqi, Yan, Meizhi, Cui, Mingyang, You, Zheng, Hu, Muzhi |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Molecular Diversity Preservation International (MDPI)
2009
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3290475/ https://www.ncbi.nlm.nih.gov/pubmed/22399981 http://dx.doi.org/10.3390/s90906951 |
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