CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing

The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators...

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Autores principales: Nirschl, Martin, Rantala, Arto, Tukkiniemi, Kari, Auer, Sanna, Hellgren, Ann-Charlotte, Pitzer, Dana, Schreiter, Matthias, Vikholm-Lundin, Inger
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2010
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3292114/
https://www.ncbi.nlm.nih.gov/pubmed/22399875
http://dx.doi.org/10.3390/s100504180
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author Nirschl, Martin
Rantala, Arto
Tukkiniemi, Kari
Auer, Sanna
Hellgren, Ann-Charlotte
Pitzer, Dana
Schreiter, Matthias
Vikholm-Lundin, Inger
author_facet Nirschl, Martin
Rantala, Arto
Tukkiniemi, Kari
Auer, Sanna
Hellgren, Ann-Charlotte
Pitzer, Dana
Schreiter, Matthias
Vikholm-Lundin, Inger
author_sort Nirschl, Martin
collection PubMed
description The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.
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spelling pubmed-32921142012-03-07 CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing Nirschl, Martin Rantala, Arto Tukkiniemi, Kari Auer, Sanna Hellgren, Ann-Charlotte Pitzer, Dana Schreiter, Matthias Vikholm-Lundin, Inger Sensors (Basel) Article The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA. Molecular Diversity Preservation International (MDPI) 2010-04-27 /pmc/articles/PMC3292114/ /pubmed/22399875 http://dx.doi.org/10.3390/s100504180 Text en © 2010 by the authors; licensee MDPI, Basel, Switzerland. This article is an open-access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).
spellingShingle Article
Nirschl, Martin
Rantala, Arto
Tukkiniemi, Kari
Auer, Sanna
Hellgren, Ann-Charlotte
Pitzer, Dana
Schreiter, Matthias
Vikholm-Lundin, Inger
CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing
title CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing
title_full CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing
title_fullStr CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing
title_full_unstemmed CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing
title_short CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing
title_sort cmos-integrated film bulk acoustic resonators for label-free biosensing
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3292114/
https://www.ncbi.nlm.nih.gov/pubmed/22399875
http://dx.doi.org/10.3390/s100504180
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