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Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine

In this contribution, we report on different miniaturized bulk micro machined three-axes piezoresistive force sensors for nanopositioning and nanomeasuring machine (NPMM). Various boss membrane structures, such as one boss full/cross, five boss full/cross and swastika membranes, were used as a basic...

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Detalles Bibliográficos
Autores principales:	Tibrewala, Arti, Hofmann, Norbert, Phataralaoha, Anurak, Jäger, Gerd, Büttgenbach, Stephanus
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Molecular Diversity Preservation International (MDPI) 2009
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3297152/ https://www.ncbi.nlm.nih.gov/pubmed/22412308 http://dx.doi.org/10.3390/s90503228

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