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Preparation and characterization of ZnO microcantilever for nanoactuation

Zinc oxide [ZnO] thin films are deposited using a radiofrequency magnetron sputtering method under room temperature. Its crystalline quality, surface morphology, and composition purity are characterized by X-ray diffraction [XRD], atomic force microscopy [AFM], field-emission scanning electron micro...

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Detalles Bibliográficos
Autores principales:	Wang, Peihong, Du, Hejun, Shen, Shengnan, Zhang, Mingsheng, Liu, Bo
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer 2012
Materias:	Nano Express
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3312835/ https://www.ncbi.nlm.nih.gov/pubmed/22401138 http://dx.doi.org/10.1186/1556-276X-7-176

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