Immobilization of enzyme and antibody on ALD-HfO(2)-EIS structure by NH(3 )plasma treatment

Thin hafnium oxide layers deposited by an atomic layer deposition system were investigated as the sensing membrane of the electrolyte-insulator-semiconductor structure. Moreover, a post-remote NH(3 )plasma treatment was proposed to replace the complicated silanization procedure for enzyme immobiliza...

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Autores principales: Wang, I-Shun, Lin, Yi-Ting, Huang, Chi-Hsien, Lu, Tseng-Fu, Lue, Cheng-En, Yang, Polung, Pijanswska, Dorota G, Yang, Chia-Ming, Wang, Jer-Chyi, Yu, Jau-Song, Chang, Yu-Sun, Chou, Chien, Lai, Chao-Sung
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2012
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3329401/
https://www.ncbi.nlm.nih.gov/pubmed/22401350
http://dx.doi.org/10.1186/1556-276X-7-179
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author Wang, I-Shun
Lin, Yi-Ting
Huang, Chi-Hsien
Lu, Tseng-Fu
Lue, Cheng-En
Yang, Polung
Pijanswska, Dorota G
Yang, Chia-Ming
Wang, Jer-Chyi
Yu, Jau-Song
Chang, Yu-Sun
Chou, Chien
Lai, Chao-Sung
author_facet Wang, I-Shun
Lin, Yi-Ting
Huang, Chi-Hsien
Lu, Tseng-Fu
Lue, Cheng-En
Yang, Polung
Pijanswska, Dorota G
Yang, Chia-Ming
Wang, Jer-Chyi
Yu, Jau-Song
Chang, Yu-Sun
Chou, Chien
Lai, Chao-Sung
author_sort Wang, I-Shun
collection PubMed
description Thin hafnium oxide layers deposited by an atomic layer deposition system were investigated as the sensing membrane of the electrolyte-insulator-semiconductor structure. Moreover, a post-remote NH(3 )plasma treatment was proposed to replace the complicated silanization procedure for enzyme immobilization. Compared to conventional methods using chemical procedures, remote NH(3 )plasma treatment reduces the processing steps and time. The results exhibited that urea and antigen can be successfully detected, which indicated that the immobilization process is correct.
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spelling pubmed-33294012012-04-20 Immobilization of enzyme and antibody on ALD-HfO(2)-EIS structure by NH(3 )plasma treatment Wang, I-Shun Lin, Yi-Ting Huang, Chi-Hsien Lu, Tseng-Fu Lue, Cheng-En Yang, Polung Pijanswska, Dorota G Yang, Chia-Ming Wang, Jer-Chyi Yu, Jau-Song Chang, Yu-Sun Chou, Chien Lai, Chao-Sung Nanoscale Res Lett Nano Express Thin hafnium oxide layers deposited by an atomic layer deposition system were investigated as the sensing membrane of the electrolyte-insulator-semiconductor structure. Moreover, a post-remote NH(3 )plasma treatment was proposed to replace the complicated silanization procedure for enzyme immobilization. Compared to conventional methods using chemical procedures, remote NH(3 )plasma treatment reduces the processing steps and time. The results exhibited that urea and antigen can be successfully detected, which indicated that the immobilization process is correct. Springer 2012-03-08 /pmc/articles/PMC3329401/ /pubmed/22401350 http://dx.doi.org/10.1186/1556-276X-7-179 Text en Copyright ©2012 Wang et al; licensee Springer. http://creativecommons.org/licenses/by/2.0 This is an Open Access article distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/2.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
spellingShingle Nano Express
Wang, I-Shun
Lin, Yi-Ting
Huang, Chi-Hsien
Lu, Tseng-Fu
Lue, Cheng-En
Yang, Polung
Pijanswska, Dorota G
Yang, Chia-Ming
Wang, Jer-Chyi
Yu, Jau-Song
Chang, Yu-Sun
Chou, Chien
Lai, Chao-Sung
Immobilization of enzyme and antibody on ALD-HfO(2)-EIS structure by NH(3 )plasma treatment
title Immobilization of enzyme and antibody on ALD-HfO(2)-EIS structure by NH(3 )plasma treatment
title_full Immobilization of enzyme and antibody on ALD-HfO(2)-EIS structure by NH(3 )plasma treatment
title_fullStr Immobilization of enzyme and antibody on ALD-HfO(2)-EIS structure by NH(3 )plasma treatment
title_full_unstemmed Immobilization of enzyme and antibody on ALD-HfO(2)-EIS structure by NH(3 )plasma treatment
title_short Immobilization of enzyme and antibody on ALD-HfO(2)-EIS structure by NH(3 )plasma treatment
title_sort immobilization of enzyme and antibody on ald-hfo(2)-eis structure by nh(3 )plasma treatment
topic Nano Express
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3329401/
https://www.ncbi.nlm.nih.gov/pubmed/22401350
http://dx.doi.org/10.1186/1556-276X-7-179
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