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Dynamic response of a cracked atomic force microscope cantilever used for nanomachining
The vibration behavior of an atomic force microscope [AFM] cantilever with a crack during the nanomachining process is studied. The cantilever is divided into two segments by the crack, and a rotational spring is used to simulate the crack. The two individual governing equations of transverse vibrat...
Autores principales: | Lee, Haw-Long, Chang, Win-Jin |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer
2012
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3331827/ https://www.ncbi.nlm.nih.gov/pubmed/22335820 http://dx.doi.org/10.1186/1556-276X-7-131 |
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