Electromechanical Characteristic Analysis of Passive Matrix Addressing for Grating Light Modulator

A Grating Light Modulator (GLM) based on Micro-Electro-Mechanical Systems (MEMS) is applied in projection display. The operating principle of the GLM is introduced in this paper. The electromechanical characteristic of the passive matrix addressing GLM is studied. It was found that if the spring constant is larger, both the response frequency and the driving voltage are larger. Theoretical analysis shows that the operating voltage and the pull-in voltage of the GLM are 8.16 and 8.74 V, respectively. When an all-selected pixel in a m×n array is actuated by a voltage V(0), the voltages of the half-selected pixel in row and column are V(0)(m–1)/(m+n–1) and V(0)(n–1)/(m+n–1), respectively, and the voltage of the non-selected pixel is V(0)/(m+n–1). Finally, the experimental results indicate that the operating voltage and the pull-in voltage are 7.8 and 8.5V respectively, and the response frequency of the GLM is about 7 kHz. The crosstalk in a 16×16 GLM array is validated by the experiment. These studies provide a theoretical basis for improving the GLM driver.