A Novel Integrated Multifunction Micro-Sensor for Three-Dimensional Micro-Force Measurements

An integrated multifunction micro-sensor for three-dimensional micro-force precision measurement under different pressure and temperature conditions is introduced in this paper. The integrated sensor consists of three kinds of sensors: a three-dimensional micro-force sensor, an absolute pressure sen...

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Detalles Bibliográficos
Autores principales: Wang, Weizhong, Zhao, Yulong, Qin, Yafei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2012
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3355398/
https://www.ncbi.nlm.nih.gov/pubmed/22666017
http://dx.doi.org/10.3390/s120404051

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3355398/
https://www.ncbi.nlm.nih.gov/pubmed/22666017
http://dx.doi.org/10.3390/s120404051

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