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A Novel Integrated Multifunction Micro-Sensor for Three-Dimensional Micro-Force Measurements
An integrated multifunction micro-sensor for three-dimensional micro-force precision measurement under different pressure and temperature conditions is introduced in this paper. The integrated sensor consists of three kinds of sensors: a three-dimensional micro-force sensor, an absolute pressure sen...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Molecular Diversity Preservation International (MDPI)
2012
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3355398/ https://www.ncbi.nlm.nih.gov/pubmed/22666017 http://dx.doi.org/10.3390/s120404051 |