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Fabrication and characterization of High Q polymer micro-ring resonator and its application as a sensitive ultrasonic detector
Smooth sidewall silicon micro-ring molds have been fabricated using resist reflow and thermal oxidation method. High Q factor polymer micro-ring resonators have been fabricated using these molds. Quality factors as high as 10(5) have been measured at telecommunication wavelength range. By carefully...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Optical Society of America
2011
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3368304/ https://www.ncbi.nlm.nih.gov/pubmed/21263625 http://dx.doi.org/10.1364/OE.19.000861 |