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Measurements of True Leak Rates of MEMS Packages
Gas transport mechanisms that characterize the hermetic behavior of MEMS packages are fundamentally different depending upon which sealing materials are used in the packages. In metallic seals, gas transport occurs through a few nanoscale leak channels (gas conduction) that are produced randomly dur...
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Molecular Diversity Preservation International (MDPI)
2012
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3376579/ https://www.ncbi.nlm.nih.gov/pubmed/22736994 http://dx.doi.org/10.3390/s120303082 |