Quantitative Exposure Assessment of Various Chemical Substances in a Wafer Fabrication Industry Facility

OBJECTIVES: This study was designed to evaluate exposure levels of various chemicals used in wafer fabrication product lines in the semiconductor industry where work-related leukemia has occurred. METHODS: The research focused on 9 representative wafer fabrication bays among a total of 25 bays in a...

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Detalles Bibliográficos
Autores principales: Park, Hyunhee, Jang, Jae-Kil, Shin, Jung-Ah
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Occupational Safety and Health Research Institute 2011
Materias:
Original Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3431888/
https://www.ncbi.nlm.nih.gov/pubmed/22953186
http://dx.doi.org/10.5491/SHAW.2011.2.1.39

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3431888/
https://www.ncbi.nlm.nih.gov/pubmed/22953186
http://dx.doi.org/10.5491/SHAW.2011.2.1.39

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