Temperature Effects on the Propagation Characteristics of Love Waves along Multi-Guide Layers of Sio(2)/Su-8 on St-90°X Quartz

Theoretical calculations have been performed on the temperature effects on the propagation characteristics of Love waves in layered structures by solving the coupled electromechanical field equations, and the optimal design parameters were extracted for temperature stability improvement. Based on th...

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Detalles Bibliográficos
Autores principales: Xu, Fangqian, Wang, Wen, Hou, Jiaoli, Liu, Minghua
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2012
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3435978/
https://www.ncbi.nlm.nih.gov/pubmed/22969349
http://dx.doi.org/10.3390/s120607337
Descripción
Sumario:Theoretical calculations have been performed on the temperature effects on the propagation characteristics of Love waves in layered structures by solving the coupled electromechanical field equations, and the optimal design parameters were extracted for temperature stability improvement. Based on the theoretical analysis, excellent temperature coefficient of frequency (Tcf) of the fabricated Love wave devices with guide layers of SU-8/SiO(2) on ST-90°X quartz substrate is evaluated experimentally as only 2.16 ppm.

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