Temperature Effects on the Propagation Characteristics of Love Waves along Multi-Guide Layers of Sio(2)/Su-8 on St-90°X Quartz

Theoretical calculations have been performed on the temperature effects on the propagation characteristics of Love waves in layered structures by solving the coupled electromechanical field equations, and the optimal design parameters were extracted for temperature stability improvement. Based on th...

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Detalles Bibliográficos
Autores principales: Xu, Fangqian, Wang, Wen, Hou, Jiaoli, Liu, Minghua
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2012
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3435978/
https://www.ncbi.nlm.nih.gov/pubmed/22969349
http://dx.doi.org/10.3390/s120607337
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author Xu, Fangqian
Wang, Wen
Hou, Jiaoli
Liu, Minghua
author_facet Xu, Fangqian
Wang, Wen
Hou, Jiaoli
Liu, Minghua
author_sort Xu, Fangqian
collection PubMed
description Theoretical calculations have been performed on the temperature effects on the propagation characteristics of Love waves in layered structures by solving the coupled electromechanical field equations, and the optimal design parameters were extracted for temperature stability improvement. Based on the theoretical analysis, excellent temperature coefficient of frequency (Tcf) of the fabricated Love wave devices with guide layers of SU-8/SiO(2) on ST-90°X quartz substrate is evaluated experimentally as only 2.16 ppm.
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spelling pubmed-34359782012-09-11 Temperature Effects on the Propagation Characteristics of Love Waves along Multi-Guide Layers of Sio(2)/Su-8 on St-90°X Quartz Xu, Fangqian Wang, Wen Hou, Jiaoli Liu, Minghua Sensors (Basel) Article Theoretical calculations have been performed on the temperature effects on the propagation characteristics of Love waves in layered structures by solving the coupled electromechanical field equations, and the optimal design parameters were extracted for temperature stability improvement. Based on the theoretical analysis, excellent temperature coefficient of frequency (Tcf) of the fabricated Love wave devices with guide layers of SU-8/SiO(2) on ST-90°X quartz substrate is evaluated experimentally as only 2.16 ppm. Molecular Diversity Preservation International (MDPI) 2012-05-30 /pmc/articles/PMC3435978/ /pubmed/22969349 http://dx.doi.org/10.3390/s120607337 Text en © 2012 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).
spellingShingle Article
Xu, Fangqian
Wang, Wen
Hou, Jiaoli
Liu, Minghua
Temperature Effects on the Propagation Characteristics of Love Waves along Multi-Guide Layers of Sio(2)/Su-8 on St-90°X Quartz
title Temperature Effects on the Propagation Characteristics of Love Waves along Multi-Guide Layers of Sio(2)/Su-8 on St-90°X Quartz
title_full Temperature Effects on the Propagation Characteristics of Love Waves along Multi-Guide Layers of Sio(2)/Su-8 on St-90°X Quartz
title_fullStr Temperature Effects on the Propagation Characteristics of Love Waves along Multi-Guide Layers of Sio(2)/Su-8 on St-90°X Quartz
title_full_unstemmed Temperature Effects on the Propagation Characteristics of Love Waves along Multi-Guide Layers of Sio(2)/Su-8 on St-90°X Quartz
title_short Temperature Effects on the Propagation Characteristics of Love Waves along Multi-Guide Layers of Sio(2)/Su-8 on St-90°X Quartz
title_sort temperature effects on the propagation characteristics of love waves along multi-guide layers of sio(2)/su-8 on st-90°x quartz
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3435978/
https://www.ncbi.nlm.nih.gov/pubmed/22969349
http://dx.doi.org/10.3390/s120607337
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