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Voice coil-based scanning probe microscopy

We present a novel system for large-area scanning probe microscopy (SPM) measurements based on minimum counter-force linear guidance mechanisms, voice coils, interferometers and fuzzy logic-based feedback loop electronics. It is shown that voice coil-based actuation combined with interferometry can...

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Detalles Bibliográficos
Autores principales:	Klapetek, Petr, Duchoň, Václav, Sobota, Jaroslav
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer 2012
Materias:	Nano Express
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3442967/ https://www.ncbi.nlm.nih.gov/pubmed/22720756 http://dx.doi.org/10.1186/1556-276X-7-332

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