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Design and Analysis of a Compact Precision Positioning Platform Integrating Strain Gauges and the Piezoactuator

Miniaturization precision positioning platforms are needed for in situ nanomechanical test applications. This paper proposes a compact precision positioning platform integrating strain gauges and the piezoactuator. Effects of geometric parameters of two parallel plates on Von Mises stress distributi...

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Detalles Bibliográficos
Autores principales: Huang, Hu, Zhao, Hongwei, Yang, Zhaojun, Fan, Zunqiang, Wan, Shunguang, Shi, Chengli, Ma, Zhichao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2012
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3444124/
https://www.ncbi.nlm.nih.gov/pubmed/23012566
http://dx.doi.org/10.3390/s120709697
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author Huang, Hu
Zhao, Hongwei
Yang, Zhaojun
Fan, Zunqiang
Wan, Shunguang
Shi, Chengli
Ma, Zhichao
author_facet Huang, Hu
Zhao, Hongwei
Yang, Zhaojun
Fan, Zunqiang
Wan, Shunguang
Shi, Chengli
Ma, Zhichao
author_sort Huang, Hu
collection PubMed
description Miniaturization precision positioning platforms are needed for in situ nanomechanical test applications. This paper proposes a compact precision positioning platform integrating strain gauges and the piezoactuator. Effects of geometric parameters of two parallel plates on Von Mises stress distribution as well as static and dynamic characteristics of the platform were studied by the finite element method. Results of the calibration experiment indicate that the strain gauge sensor has good linearity and its sensitivity is about 0.0468 mV/μm. A closed-loop control system was established to solve the problem of nonlinearity of the platform. Experimental results demonstrate that for the displacement control process, both the displacement increasing portion and the decreasing portion have good linearity, verifying that the control system is available. The developed platform has a compact structure but can realize displacement measurement with the embedded strain gauges, which is useful for the closed-loop control and structure miniaturization of piezo devices. It has potential applications in nanoindentation and nanoscratch tests, especially in the field of in situ nanomechanical testing which requires compact structures.
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spelling pubmed-34441242012-09-25 Design and Analysis of a Compact Precision Positioning Platform Integrating Strain Gauges and the Piezoactuator Huang, Hu Zhao, Hongwei Yang, Zhaojun Fan, Zunqiang Wan, Shunguang Shi, Chengli Ma, Zhichao Sensors (Basel) Article Miniaturization precision positioning platforms are needed for in situ nanomechanical test applications. This paper proposes a compact precision positioning platform integrating strain gauges and the piezoactuator. Effects of geometric parameters of two parallel plates on Von Mises stress distribution as well as static and dynamic characteristics of the platform were studied by the finite element method. Results of the calibration experiment indicate that the strain gauge sensor has good linearity and its sensitivity is about 0.0468 mV/μm. A closed-loop control system was established to solve the problem of nonlinearity of the platform. Experimental results demonstrate that for the displacement control process, both the displacement increasing portion and the decreasing portion have good linearity, verifying that the control system is available. The developed platform has a compact structure but can realize displacement measurement with the embedded strain gauges, which is useful for the closed-loop control and structure miniaturization of piezo devices. It has potential applications in nanoindentation and nanoscratch tests, especially in the field of in situ nanomechanical testing which requires compact structures. Molecular Diversity Preservation International (MDPI) 2012-07-17 /pmc/articles/PMC3444124/ /pubmed/23012566 http://dx.doi.org/10.3390/s120709697 Text en © 2012 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).
spellingShingle Article
Huang, Hu
Zhao, Hongwei
Yang, Zhaojun
Fan, Zunqiang
Wan, Shunguang
Shi, Chengli
Ma, Zhichao
Design and Analysis of a Compact Precision Positioning Platform Integrating Strain Gauges and the Piezoactuator
title Design and Analysis of a Compact Precision Positioning Platform Integrating Strain Gauges and the Piezoactuator
title_full Design and Analysis of a Compact Precision Positioning Platform Integrating Strain Gauges and the Piezoactuator
title_fullStr Design and Analysis of a Compact Precision Positioning Platform Integrating Strain Gauges and the Piezoactuator
title_full_unstemmed Design and Analysis of a Compact Precision Positioning Platform Integrating Strain Gauges and the Piezoactuator
title_short Design and Analysis of a Compact Precision Positioning Platform Integrating Strain Gauges and the Piezoactuator
title_sort design and analysis of a compact precision positioning platform integrating strain gauges and the piezoactuator
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3444124/
https://www.ncbi.nlm.nih.gov/pubmed/23012566
http://dx.doi.org/10.3390/s120709697
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