Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor

This paper describes the development of a polyimide/SU-8 catheter-tip MEMS gauge pressure sensor. Finite element analysis was used to investigate critical parameters, impacting on the device design and sensing characteristics. The sensing element of the device was fabricated by polyimide-based micro...

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Detalles Bibliográficos
Autores principales: Hasenkamp, Willyan, Forchelet, David, Pataky, Kristopher, Villard, Jimmy, Lintel, Harald Van, Bertsch, Arnaud, Wang, Qing, Renaud, Philippe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2012
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3444706/
https://www.ncbi.nlm.nih.gov/pubmed/22639233
http://dx.doi.org/10.1007/s10544-012-9661-8
Descripción
Sumario:This paper describes the development of a polyimide/SU-8 catheter-tip MEMS gauge pressure sensor. Finite element analysis was used to investigate critical parameters, impacting on the device design and sensing characteristics. The sensing element of the device was fabricated by polyimide-based micromachining on a flexible membrane, using embedded thin-film metallic wires as piezoresistive elements. A chamber containing this flexible membrane was sealed using an adapted SU-8 bonding technique. The device was evaluated experimentally and its overall performance compared with a commercial silicon-based pressure sensor. Furthermore, the device use was demonstrated by measuring blood pressure and heart rate in vivo.

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