Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor

This paper describes the development of a polyimide/SU-8 catheter-tip MEMS gauge pressure sensor. Finite element analysis was used to investigate critical parameters, impacting on the device design and sensing characteristics. The sensing element of the device was fabricated by polyimide-based micro...

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Detalles Bibliográficos
Autores principales: Hasenkamp, Willyan, Forchelet, David, Pataky, Kristopher, Villard, Jimmy, Lintel, Harald Van, Bertsch, Arnaud, Wang, Qing, Renaud, Philippe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2012
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3444706/
https://www.ncbi.nlm.nih.gov/pubmed/22639233
http://dx.doi.org/10.1007/s10544-012-9661-8
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author Hasenkamp, Willyan
Forchelet, David
Pataky, Kristopher
Villard, Jimmy
Lintel, Harald Van
Bertsch, Arnaud
Wang, Qing
Renaud, Philippe
author_facet Hasenkamp, Willyan
Forchelet, David
Pataky, Kristopher
Villard, Jimmy
Lintel, Harald Van
Bertsch, Arnaud
Wang, Qing
Renaud, Philippe
author_sort Hasenkamp, Willyan
collection PubMed
description This paper describes the development of a polyimide/SU-8 catheter-tip MEMS gauge pressure sensor. Finite element analysis was used to investigate critical parameters, impacting on the device design and sensing characteristics. The sensing element of the device was fabricated by polyimide-based micromachining on a flexible membrane, using embedded thin-film metallic wires as piezoresistive elements. A chamber containing this flexible membrane was sealed using an adapted SU-8 bonding technique. The device was evaluated experimentally and its overall performance compared with a commercial silicon-based pressure sensor. Furthermore, the device use was demonstrated by measuring blood pressure and heart rate in vivo.
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spelling pubmed-34447062012-09-25 Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor Hasenkamp, Willyan Forchelet, David Pataky, Kristopher Villard, Jimmy Lintel, Harald Van Bertsch, Arnaud Wang, Qing Renaud, Philippe Biomed Microdevices Article This paper describes the development of a polyimide/SU-8 catheter-tip MEMS gauge pressure sensor. Finite element analysis was used to investigate critical parameters, impacting on the device design and sensing characteristics. The sensing element of the device was fabricated by polyimide-based micromachining on a flexible membrane, using embedded thin-film metallic wires as piezoresistive elements. A chamber containing this flexible membrane was sealed using an adapted SU-8 bonding technique. The device was evaluated experimentally and its overall performance compared with a commercial silicon-based pressure sensor. Furthermore, the device use was demonstrated by measuring blood pressure and heart rate in vivo. Springer US 2012-05-26 2012 /pmc/articles/PMC3444706/ /pubmed/22639233 http://dx.doi.org/10.1007/s10544-012-9661-8 Text en © The Author(s) 2012 https://creativecommons.org/licenses/by/4.0/This article is distributed under the terms of the Creative Commons Attribution License which permits any use, distribution, and reproduction in any medium, provided the original author(s) and the source are credited.
spellingShingle Article
Hasenkamp, Willyan
Forchelet, David
Pataky, Kristopher
Villard, Jimmy
Lintel, Harald Van
Bertsch, Arnaud
Wang, Qing
Renaud, Philippe
Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor
title Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor
title_full Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor
title_fullStr Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor
title_full_unstemmed Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor
title_short Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor
title_sort polyimide/su-8 catheter-tip mems gauge pressure sensor
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3444706/
https://www.ncbi.nlm.nih.gov/pubmed/22639233
http://dx.doi.org/10.1007/s10544-012-9661-8
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