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Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor

This paper describes the development of a polyimide/SU-8 catheter-tip MEMS gauge pressure sensor. Finite element analysis was used to investigate critical parameters, impacting on the device design and sensing characteristics. The sensing element of the device was fabricated by polyimide-based micro...

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Detalles Bibliográficos
Autores principales:	Hasenkamp, Willyan, Forchelet, David, Pataky, Kristopher, Villard, Jimmy, Lintel, Harald Van, Bertsch, Arnaud, Wang, Qing, Renaud, Philippe
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer US 2012
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3444706/ https://www.ncbi.nlm.nih.gov/pubmed/22639233 http://dx.doi.org/10.1007/s10544-012-9661-8

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