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Fabrication of High Sensitivity Carbon Microcoil Pressure Sensors

This work demonstrates a highly sensitive pressure sensor that was fabricated using carbon microcoils (CMCs) and polydimethylsiloxane (PDMS). CMCs were grown by chemical vapor deposition using various ratios of Fe-Sn catalytic solution. The pressure sensor has a sandwiched structure, in which the as...

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Detalles Bibliográficos
Autores principales:	Su, Chih-Chung, Li, Chen-Hung, Chang, Neng-Kai, Gao, Feng, Chang, Shuo-Hung
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Molecular Diversity Preservation International (MDPI) 2012
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3472814/ https://www.ncbi.nlm.nih.gov/pubmed/23112586 http://dx.doi.org/10.3390/s120810034

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