A Fully Integrated Humidity Sensor System-on-Chip Fabricated by Micro-Stamping Technology

A fully integrated humidity sensor chip was designed, implemented, and tested. Utilizing the micro-stamping technology, the pseudo-3D sensor system-on-chip (SSoC) architecture can be implemented by stacking sensing materials directly on the top of a CMOS-fabricated chip. The fabricated sensor system...

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Detalles Bibliográficos
Autores principales: Huang, Che-Wei, Huang, Yu-Jie, Lu, Shey-Shi, Lin, Chih-Ting
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2012
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3478799/
http://dx.doi.org/10.3390/s120911592

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3478799/
http://dx.doi.org/10.3390/s120911592

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