Cargando…
Opto-structural studies of well-dispersed silicon nano-crystals grown by atom beam sputtering
Synthesis and characterization of nano-crystalline silicon grown by atom beam sputtering technique are reported. Rapid thermal annealing of the deposited films is carried out in Ar + 5% H(2) atmosphere for 5 min at different temperatures for precipitation of silicon nano-crystals. The samples are ch...
| Autores principales: | , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2012
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3502530/ https://www.ncbi.nlm.nih.gov/pubmed/23031449 http://dx.doi.org/10.1186/1556-276X-7-547 |