Laser etching of groove structures with micro-optical fiber-enhanced irradiation

A microfiber is used as a laser-focusing unit to fabricate a groove structure on TiAlSiN surfaces. After one laser pulse etching, a groove with the minimum width of 265 nm is manufactured at the area. This technique of microfabricating the groove in microscale is studied. Based on the near-field int...

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Detalles Bibliográficos
Autores principales: Liu, Dameng, Liu, Jiachen, Wang, Hui, Shao, Tianmin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2012
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3503691/
https://www.ncbi.nlm.nih.gov/pubmed/22713521
http://dx.doi.org/10.1186/1556-276X-7-318
Descripción
Sumario:A microfiber is used as a laser-focusing unit to fabricate a groove structure on TiAlSiN surfaces. After one laser pulse etching, a groove with the minimum width of 265 nm is manufactured at the area. This technique of microfabricating the groove in microscale is studied. Based on the near-field intensity enhancement at the contact area between the fiber and the surface during the laser irradiation, simulation results are also presented, which agree well with the experimental results.

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