Laser etching of groove structures with micro-optical fiber-enhanced irradiation

A microfiber is used as a laser-focusing unit to fabricate a groove structure on TiAlSiN surfaces. After one laser pulse etching, a groove with the minimum width of 265 nm is manufactured at the area. This technique of microfabricating the groove in microscale is studied. Based on the near-field int...

Descripción completa

Detalles Bibliográficos
Autores principales: Liu, Dameng, Liu, Jiachen, Wang, Hui, Shao, Tianmin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2012
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3503691/
https://www.ncbi.nlm.nih.gov/pubmed/22713521
http://dx.doi.org/10.1186/1556-276X-7-318
_version_ 1782250486136569856
author Liu, Dameng
Liu, Jiachen
Wang, Hui
Shao, Tianmin
author_facet Liu, Dameng
Liu, Jiachen
Wang, Hui
Shao, Tianmin
author_sort Liu, Dameng
collection PubMed
description A microfiber is used as a laser-focusing unit to fabricate a groove structure on TiAlSiN surfaces. After one laser pulse etching, a groove with the minimum width of 265 nm is manufactured at the area. This technique of microfabricating the groove in microscale is studied. Based on the near-field intensity enhancement at the contact area between the fiber and the surface during the laser irradiation, simulation results are also presented, which agree well with the experimental results.
format Online
Article
Text
id pubmed-3503691
institution National Center for Biotechnology Information
language English
publishDate 2012
publisher Springer
record_format MEDLINE/PubMed
spelling pubmed-35036912012-11-26 Laser etching of groove structures with micro-optical fiber-enhanced irradiation Liu, Dameng Liu, Jiachen Wang, Hui Shao, Tianmin Nanoscale Res Lett Nano Express A microfiber is used as a laser-focusing unit to fabricate a groove structure on TiAlSiN surfaces. After one laser pulse etching, a groove with the minimum width of 265 nm is manufactured at the area. This technique of microfabricating the groove in microscale is studied. Based on the near-field intensity enhancement at the contact area between the fiber and the surface during the laser irradiation, simulation results are also presented, which agree well with the experimental results. Springer 2012-06-19 /pmc/articles/PMC3503691/ /pubmed/22713521 http://dx.doi.org/10.1186/1556-276X-7-318 Text en Copyright ©2012 LIU et al.;licensee BioMed Central Ltd. http://creativecommons.org/licenses/by/2.0 This is an Open Access article distributed under the terms of the Creative Commons Attribution License ( http://creativecommons.org/licenses/by/2.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
spellingShingle Nano Express
Liu, Dameng
Liu, Jiachen
Wang, Hui
Shao, Tianmin
Laser etching of groove structures with micro-optical fiber-enhanced irradiation
title Laser etching of groove structures with micro-optical fiber-enhanced irradiation
title_full Laser etching of groove structures with micro-optical fiber-enhanced irradiation
title_fullStr Laser etching of groove structures with micro-optical fiber-enhanced irradiation
title_full_unstemmed Laser etching of groove structures with micro-optical fiber-enhanced irradiation
title_short Laser etching of groove structures with micro-optical fiber-enhanced irradiation
title_sort laser etching of groove structures with micro-optical fiber-enhanced irradiation
topic Nano Express
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3503691/
https://www.ncbi.nlm.nih.gov/pubmed/22713521
http://dx.doi.org/10.1186/1556-276X-7-318
work_keys_str_mv AT liudameng laseretchingofgroovestructureswithmicroopticalfiberenhancedirradiation
AT liujiachen laseretchingofgroovestructureswithmicroopticalfiberenhancedirradiation
AT wanghui laseretchingofgroovestructureswithmicroopticalfiberenhancedirradiation
AT shaotianmin laseretchingofgroovestructureswithmicroopticalfiberenhancedirradiation

Ejemplares similares