Porous silicon bulk acoustic wave resonator with integrated transducer

We report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties of porous silicon in order to form a monolith...

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Detalles Bibliográficos
Autores principales: Aliev, Gazi N, Goller, Bernhard, Snow, Paul A, Heinrich, Helge, Yuan, Biao, Aigner, Robert
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2012
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3508590/
https://www.ncbi.nlm.nih.gov/pubmed/22776697
http://dx.doi.org/10.1186/1556-276X-7-378
Descripción
Sumario:We report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties of porous silicon in order to form a monolithically integrated bulk acoustic wave resonator.

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