Porous silicon bulk acoustic wave resonator with integrated transducer

We report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties of porous silicon in order to form a monolith...

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Detalles Bibliográficos
Autores principales: Aliev, Gazi N, Goller, Bernhard, Snow, Paul A, Heinrich, Helge, Yuan, Biao, Aigner, Robert
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2012
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3508590/
https://www.ncbi.nlm.nih.gov/pubmed/22776697
http://dx.doi.org/10.1186/1556-276X-7-378
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author Aliev, Gazi N
Goller, Bernhard
Snow, Paul A
Heinrich, Helge
Yuan, Biao
Aigner, Robert
author_facet Aliev, Gazi N
Goller, Bernhard
Snow, Paul A
Heinrich, Helge
Yuan, Biao
Aigner, Robert
author_sort Aliev, Gazi N
collection PubMed
description We report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties of porous silicon in order to form a monolithically integrated bulk acoustic wave resonator.
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spelling pubmed-35085902012-11-29 Porous silicon bulk acoustic wave resonator with integrated transducer Aliev, Gazi N Goller, Bernhard Snow, Paul A Heinrich, Helge Yuan, Biao Aigner, Robert Nanoscale Res Lett Nano Express We report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties of porous silicon in order to form a monolithically integrated bulk acoustic wave resonator. Springer 2012-07-09 /pmc/articles/PMC3508590/ /pubmed/22776697 http://dx.doi.org/10.1186/1556-276X-7-378 Text en Copyright ©2012 Aliev et al.; licensee BioMed Central Ltd.
spellingShingle Nano Express
Aliev, Gazi N
Goller, Bernhard
Snow, Paul A
Heinrich, Helge
Yuan, Biao
Aigner, Robert
Porous silicon bulk acoustic wave resonator with integrated transducer
title Porous silicon bulk acoustic wave resonator with integrated transducer
title_full Porous silicon bulk acoustic wave resonator with integrated transducer
title_fullStr Porous silicon bulk acoustic wave resonator with integrated transducer
title_full_unstemmed Porous silicon bulk acoustic wave resonator with integrated transducer
title_short Porous silicon bulk acoustic wave resonator with integrated transducer
title_sort porous silicon bulk acoustic wave resonator with integrated transducer
topic Nano Express
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3508590/
https://www.ncbi.nlm.nih.gov/pubmed/22776697
http://dx.doi.org/10.1186/1556-276X-7-378
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AT heinrichhelge poroussiliconbulkacousticwaveresonatorwithintegratedtransducer
AT yuanbiao poroussiliconbulkacousticwaveresonatorwithintegratedtransducer
AT aignerrobert poroussiliconbulkacousticwaveresonatorwithintegratedtransducer

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