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Porous silicon bulk acoustic wave resonator with integrated transducer
We report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties of porous silicon in order to form a monolith...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2012
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3508590/ https://www.ncbi.nlm.nih.gov/pubmed/22776697 http://dx.doi.org/10.1186/1556-276X-7-378 |