Novel Air Flow Meter for an Automobile Engine Using a Si Sensor with Porous Si Thermal Isolation

An air flow meter for measuring the intake air of an automobile engine is presented. It is based on a miniaturized silicon thermal mass flow sensor using a thick porous Si (Po-Si) layer for local thermal isolation from the Si substrate, on which the sensor active elements are integrated. The sensor...

Descripción completa

Detalles Bibliográficos
Autores principales: Hourdakis, Emmanouel, Sarafis, Panagiotis, Nassiopoulou, Androula G.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2012
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3522942/
https://www.ncbi.nlm.nih.gov/pubmed/23202189
http://dx.doi.org/10.3390/s121114838

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3522942/
https://www.ncbi.nlm.nih.gov/pubmed/23202189
http://dx.doi.org/10.3390/s121114838

Ejemplares similares