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Composition profiling of inhomogeneous SiGe nanostructures by Raman spectroscopy

In this work, we present an experimental procedure to measure the composition distribution within inhomogeneous SiGe nanostructures. The method is based on the Raman spectra of the nanostructures, quantitatively analyzed through the knowledge of the scattering efficiency of SiGe as a function of com...

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Detalles Bibliográficos
Autores principales:	Picco, Andrea, Bonera, Emiliano, Pezzoli, Fabio, Grilli, Emanuele, Schmidt, Oliver G, Isa, Fabio, Cecchi, Stefano, Guzzi, Mario
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer 2012
Materias:	Nano Express
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3534003/ https://www.ncbi.nlm.nih.gov/pubmed/23171543 http://dx.doi.org/10.1186/1556-276X-7-633

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