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Three-dimensional AlZnO/Al(2)O(3)/AlZnO nanocapacitor arrays on Si substrate for energy storage

High density three-dimensional AZO/Al(2)O(3)/AZO nanocapacitor arrays have been fabricated for energy storage applications. Using atomic layer deposition technique, the stack of AZO/Al(2)O(3)/AZO has been grown in the porous anodic alumina template which is directly formed on the Si substrate. The f...

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Detalles Bibliográficos
Autores principales:	Li, Lian-Jie, Zhu, Bao, Ding, Shi-Jin, Lu, Hong-Liang, Sun, Qing-Qing, Jiang, Anquan, Zhang, David Wei, Zhu, Chunxiang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer 2012
Materias:	Nano Express
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3547769/ https://www.ncbi.nlm.nih.gov/pubmed/23031347 http://dx.doi.org/10.1186/1556-276X-7-544

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