Conductive AFM for CNT characterization

We report on and emphasize the versatility of conductive atomic force microscopy in characterizing vertically aligned carbon nanotubes (CNTs) aimed to be used in via interconnect technology. The study is conducted on multi-walled CNT arrays vertically grown on a copper-based metal line. Voltage-depe...

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Detalles Bibliográficos
Autores principales: Toader, Marius, Fiedler, Holger, Hermann, Sascha, Schulz, Stefan E, Gessner, Thomas, Hietschold, Michael
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2013
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3564687/
https://www.ncbi.nlm.nih.gov/pubmed/23311434
http://dx.doi.org/10.1186/1556-276X-8-24
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author Toader, Marius
Fiedler, Holger
Hermann, Sascha
Schulz, Stefan E
Gessner, Thomas
Hietschold, Michael
author_facet Toader, Marius
Fiedler, Holger
Hermann, Sascha
Schulz, Stefan E
Gessner, Thomas
Hietschold, Michael
author_sort Toader, Marius
collection PubMed
description We report on and emphasize the versatility of conductive atomic force microscopy in characterizing vertically aligned carbon nanotubes (CNTs) aimed to be used in via interconnect technology. The study is conducted on multi-walled CNT arrays vertically grown on a copper-based metal line. Voltage-dependent current mapping and current–voltage characteristics recorded down to single CNT allow for a comprehensive insight into the electric behaviour of the hybrid structure.
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spelling pubmed-35646872013-02-06 Conductive AFM for CNT characterization Toader, Marius Fiedler, Holger Hermann, Sascha Schulz, Stefan E Gessner, Thomas Hietschold, Michael Nanoscale Res Lett Nano Express We report on and emphasize the versatility of conductive atomic force microscopy in characterizing vertically aligned carbon nanotubes (CNTs) aimed to be used in via interconnect technology. The study is conducted on multi-walled CNT arrays vertically grown on a copper-based metal line. Voltage-dependent current mapping and current–voltage characteristics recorded down to single CNT allow for a comprehensive insight into the electric behaviour of the hybrid structure. Springer 2013-01-11 /pmc/articles/PMC3564687/ /pubmed/23311434 http://dx.doi.org/10.1186/1556-276X-8-24 Text en Copyright ©2013 Toader et al.; licensee Springer. http://creativecommons.org/licenses/by/2.0 This is an Open Access article distributed under the terms of the Creative Commons Attribution License ( http://creativecommons.org/licenses/by/2.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
spellingShingle Nano Express
Toader, Marius
Fiedler, Holger
Hermann, Sascha
Schulz, Stefan E
Gessner, Thomas
Hietschold, Michael
Conductive AFM for CNT characterization
title Conductive AFM for CNT characterization
title_full Conductive AFM for CNT characterization
title_fullStr Conductive AFM for CNT characterization
title_full_unstemmed Conductive AFM for CNT characterization
title_short Conductive AFM for CNT characterization
title_sort conductive afm for cnt characterization
topic Nano Express
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3564687/
https://www.ncbi.nlm.nih.gov/pubmed/23311434
http://dx.doi.org/10.1186/1556-276X-8-24
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AT hietscholdmichael conductiveafmforcntcharacterization

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