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Conductive AFM for CNT characterization

We report on and emphasize the versatility of conductive atomic force microscopy in characterizing vertically aligned carbon nanotubes (CNTs) aimed to be used in via interconnect technology. The study is conducted on multi-walled CNT arrays vertically grown on a copper-based metal line. Voltage-depe...

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Detalles Bibliográficos
Autores principales:	Toader, Marius, Fiedler, Holger, Hermann, Sascha, Schulz, Stefan E, Gessner, Thomas, Hietschold, Michael
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer 2013
Materias:	Nano Express
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3564687/ https://www.ncbi.nlm.nih.gov/pubmed/23311434 http://dx.doi.org/10.1186/1556-276X-8-24

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