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Optical and microstructural properties of ZnO/TiO(2) nanolaminates prepared by atomic layer deposition
ZnO/TiO(2) nanolaminates were grown on Si (100) and quartz substrates by atomic layer deposition at 200°C using diethylzinc, titanium isopropoxide, and deionized water as precursors. All prepared multilayers are nominally 50 nm thick with a varying number of alternating TiO(2) and ZnO layers. Sample...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer
2013
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3599444/ https://www.ncbi.nlm.nih.gov/pubmed/23442741 http://dx.doi.org/10.1186/1556-276X-8-107 |