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Morphological, compositional, structural, and optical properties of Si-nc embedded in SiO(x) films

Structural, compositional, morphological, and optical properties of silicon nanocrystal (Si-nc) embedded in a matrix of non-stoichiometric silicon oxide (SiO(x)) films were studied. SiO(x) films were prepared by hot filament chemical vapor deposition technique in the 900 to 1,400°C range. Different...

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Detalles Bibliográficos
Autores principales:	López, J Alberto Luna, López, J Carrillo, Valerdi, D E Vázquez, Salgado, G García, Díaz-Becerril, T, Pedraza, A Ponce, Gracia, F J Flores
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer 2012
Materias:	Nano Express
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3606402/ https://www.ncbi.nlm.nih.gov/pubmed/23110990 http://dx.doi.org/10.1186/1556-276X-7-604

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