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Influence of argon plasma on the deposition of Al(2)O(3) film onto the PET surfaces by atomic layer deposition

In this paper, polyethyleneterephthalate (PET) films with and without plasma pretreatment were modified by atomic layer deposition (ALD) and plasma-assisted atomic layer deposition (PA-ALD). It demonstrates that the Al(2)O(3) films are successfully deposited onto the surface of PET films. The cracks...

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Detalles Bibliográficos
Autores principales:	Edy, Riyanto, Huang, Xiaojiang, Guo, Ying, Zhang, Jing, Shi, Jianjun
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer 2013
Materias:	Nano Express
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3608948/ https://www.ncbi.nlm.nih.gov/pubmed/23413804 http://dx.doi.org/10.1186/1556-276X-8-79

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