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A look underneath the SiO(2)/4H-SiC interface after N(2)O thermal treatments

The electrical compensation effect of the nitrogen incorporation at the SiO(2)/4H-SiC (p-type) interface after thermal treatments in ambient N(2)O is investigated employing both scanning spreading resistance microscopy (SSRM) and scanning capacitance microscopy (SCM). SSRM measurements on p-type 4H-...

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Detalles Bibliográficos
Autores principales:	Fiorenza, Patrick, Giannazzo, Filippo, Swanson, Lukas K, Frazzetto, Alessia, Lorenti, Simona, Alessandrino, Mario S, Roccaforte, Fabrizio
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Beilstein-Institut 2013
Materias:	Full Research Paper
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3628548/ https://www.ncbi.nlm.nih.gov/pubmed/23616945 http://dx.doi.org/10.3762/bjnano.4.26

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