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Electrochemical and galvanic fabrication of a magnetoelectric composite sensor based on InP
A process chain for a magnetoelectric device based on porous InP will be presented using only chemical, electrochemical, photoelectrochemical, photochemical treatments and the galvanic deposition of metals in high-aspect-ratio structures. All relevant process steps starting with the formation of a s...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer
2012
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3629719/ https://www.ncbi.nlm.nih.gov/pubmed/22776718 http://dx.doi.org/10.1186/1556-276X-7-379 |
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author | Gerngross, Mark-Daniel Carstensen, Jürgen Föll, Helmut |
author_facet | Gerngross, Mark-Daniel Carstensen, Jürgen Föll, Helmut |
author_sort | Gerngross, Mark-Daniel |
collection | PubMed |
description | A process chain for a magnetoelectric device based on porous InP will be presented using only chemical, electrochemical, photoelectrochemical, photochemical treatments and the galvanic deposition of metals in high-aspect-ratio structures. All relevant process steps starting with the formation of a self-ordered array of current-line oriented pores followed by the membrane fabrication and a post-etching step, as well as the galvanic metal filling of membrane structures are presented and discussed. The resistivity of a porous InP structure could be drastically increased and, thus, the piezoelectric performance of the porous InP structure. The developed galvanic Ni filling process is capable to homogeneously fill high aspect-ratio membranes. |
format | Online Article Text |
id | pubmed-3629719 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2012 |
publisher | Springer |
record_format | MEDLINE/PubMed |
spelling | pubmed-36297192013-04-22 Electrochemical and galvanic fabrication of a magnetoelectric composite sensor based on InP Gerngross, Mark-Daniel Carstensen, Jürgen Föll, Helmut Nanoscale Res Lett Nano Express A process chain for a magnetoelectric device based on porous InP will be presented using only chemical, electrochemical, photoelectrochemical, photochemical treatments and the galvanic deposition of metals in high-aspect-ratio structures. All relevant process steps starting with the formation of a self-ordered array of current-line oriented pores followed by the membrane fabrication and a post-etching step, as well as the galvanic metal filling of membrane structures are presented and discussed. The resistivity of a porous InP structure could be drastically increased and, thus, the piezoelectric performance of the porous InP structure. The developed galvanic Ni filling process is capable to homogeneously fill high aspect-ratio membranes. Springer 2012-07-09 /pmc/articles/PMC3629719/ /pubmed/22776718 http://dx.doi.org/10.1186/1556-276X-7-379 Text en Copyright ©2012 Gerngross et al.; licensee Springer. http://creativecommons.org/licenses/by/2.0 This is an Open Access article distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/2.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. |
spellingShingle | Nano Express Gerngross, Mark-Daniel Carstensen, Jürgen Föll, Helmut Electrochemical and galvanic fabrication of a magnetoelectric composite sensor based on InP |
title | Electrochemical and galvanic fabrication of a magnetoelectric composite sensor based on InP |
title_full | Electrochemical and galvanic fabrication of a magnetoelectric composite sensor based on InP |
title_fullStr | Electrochemical and galvanic fabrication of a magnetoelectric composite sensor based on InP |
title_full_unstemmed | Electrochemical and galvanic fabrication of a magnetoelectric composite sensor based on InP |
title_short | Electrochemical and galvanic fabrication of a magnetoelectric composite sensor based on InP |
title_sort | electrochemical and galvanic fabrication of a magnetoelectric composite sensor based on inp |
topic | Nano Express |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3629719/ https://www.ncbi.nlm.nih.gov/pubmed/22776718 http://dx.doi.org/10.1186/1556-276X-7-379 |
work_keys_str_mv | AT gerngrossmarkdaniel electrochemicalandgalvanicfabricationofamagnetoelectriccompositesensorbasedoninp AT carstensenjurgen electrochemicalandgalvanicfabricationofamagnetoelectriccompositesensorbasedoninp AT follhelmut electrochemicalandgalvanicfabricationofamagnetoelectriccompositesensorbasedoninp |